JPH0249130U - - Google Patents
Info
- Publication number
- JPH0249130U JPH0249130U JP12905088U JP12905088U JPH0249130U JP H0249130 U JPH0249130 U JP H0249130U JP 12905088 U JP12905088 U JP 12905088U JP 12905088 U JP12905088 U JP 12905088U JP H0249130 U JPH0249130 U JP H0249130U
- Authority
- JP
- Japan
- Prior art keywords
- wetting device
- wafers
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12905088U JPH0249130U (en]) | 1988-09-29 | 1988-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12905088U JPH0249130U (en]) | 1988-09-29 | 1988-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0249130U true JPH0249130U (en]) | 1990-04-05 |
Family
ID=31382965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12905088U Pending JPH0249130U (en]) | 1988-09-29 | 1988-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249130U (en]) |
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1988
- 1988-09-29 JP JP12905088U patent/JPH0249130U/ja active Pending